1 kV: 1.5 nm
15 kV: 1.0 nm |
| Accelerating voltage:
0.1kV-30kV |
SEI, BSE
|
| Gentle Beam Method |
R-filter
|
| Ultra-thin window XEDS |
| Web-SEM |
|
|
| |
|
|
| JSM-7400F
high resolution scanning electron microscope |
| Applications: |
XEDS, high resolution imaging with
SEI, BSE, r-filter, and gentle beam imaging modes to provide compositional
and/or topographical information |
| Accelerating Voltage: |
100V to 30kV |
| Filament: |
Cold field emitter |
| Resolution: |
1 nm @ 15kV or 1.5nm @ 1kV |
| XEDS System: |
Ultra-thin Window Si-Li X-ray detector
(active area = 30 mm^2) capable of detecting elements with Z >4.Oxford
detector with Oxford acquisition software |
|